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Title Semiconductor machining at the micro-nano scale
ISBN 978-81-7895-301-4
Price
Individual 133 USD
Institutional 133 USD
Editor(s) Jiwang Yan and John Patten
Preface Semiconductors have become tremendously important in our society. Manufacturing of electronic, optical/optoelectronic devices and micro electro mechanical systems (MEMS) from semiconductor materials h     Read More >>

  

  
  
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